MODELING AND CONTROL FOR DEADLOCK-FREE OPERATION OF SINGLE-ARM CLUSTER TOOLS WITH CONCURRENTLY PROCESSING MULTIPLE WAFER TYPES VIA PETRI NET

Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net

Nowadays, cluster tools tend to concurrently process multiple types of wafers with similar recipes in order to improve their utilization and flexibility in semiconductor manufacturing.Different wafer types may have different wafer flow patterns, resulting in that cluster tools are deadlock-prone.It is challenging to develop a general method to solv

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Evaluation of Diagnostic Value of Sediment Cytology in Oral Malignant and Oral Potentially Malignant Disorders

Introduction: Globally, highest prevalence of oral cancer has been observed in Indian subcontinent due to exposure to carcinogens such as betel nut extracts, smoking Hydration and chewing form of tobacco.Usually, cancer develops through rising grades of oral epithelial dysplasia which can arise from Oral Potentially Malignant Disorders (OPMD) and l

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Evaluation of Diagnostic Value of Sediment Cytology in Oral Malignant and Oral Potentially Malignant Disorders

Introduction: Globally, highest prevalence of oral cancer has been observed in Indian subcontinent due to exposure to carcinogens such as betel nut extracts, smoking Hydration and chewing form of tobacco.Usually, cancer develops through rising grades of oral epithelial dysplasia which can arise from Oral Potentially Malignant Disorders (OPMD) and l

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